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Piezo Nanopositioner Product List

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High-Precision Piezo Nano Positioner P-611.1 for Semiconductor Manufacturing

Achieving nanometer precision positioning in a compact and cost-effective manner.

In the semiconductor industry, as manufacturing processes become more advanced, high precision in the positioning of wafers and masks is required. Particularly in fine processing and inspection processes, positioning accuracy at the nanometer level affects product quality. Conventional systems have faced challenges such as large size and high costs. The P-611.1 piezo nano-positioner achieves precise positioning in semiconductor manufacturing at a low cost, with a compact design occupying only 44 x 44 mm, while providing a maximum stroke of 120 μm and a resolution of 0.2 nm. 【Application Scenarios】 - Wafer probing - Mask alignment - Fine processing - Inspection processes 【Benefits of Implementation】 - Improved yield through high-precision positioning - Space-saving due to equipment miniaturization - Enhanced return on investment through cost reduction

  • P-611.1S_KUZ.jpg
  • Actuator
  • Piezoelectric Devices
  • encoder
  • Piezo Nanopositioner

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P-611.1 Piezo Nanopositioner for Microscopes

Supports microscope scanning with low cost and compact design.

In scanning applications of microscopes, high precision positioning and stability are required. Especially in the observation and image acquisition of fine structures, accurate position control at the nano level is essential. If the positioning accuracy is low, there is a risk of missing the observation target or reducing the resolution of the images. The P-611.1 piezo nanopositioner is ideal for microscope scanning applications due to its compact design and high precision positioning performance. 【Usage Scenarios】 - Microscope observation - Scanning electron microscopy - Precision positioning of samples 【Benefits of Implementation】 - Improved observation accuracy through high precision positioning - Effective use of installation space due to compact design - Cost-effective implementation

  • P-611.1S_KUZ.jpg
  • Actuator
  • Piezoelectric Devices
  • encoder
  • Piezo Nanopositioner

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[Piezonano Positioner P-611.1 for Precision Machinery Assembly]

Ideal for nano-precision assembly that cannot be achieved with conventional motor stages.

In the field of precision machinery assembly, the accurate positioning of components affects the quality of the product. Particularly in the assembly of fine parts, high-precision positioning is required. Low positioning accuracy can lead to product defects and increased assembly time. The P-611.1 piezo nanopositioner, while being low-cost and featuring a compact design of 44 x 44 mm, achieves a resolution of 0.2 nm and a maximum stroke of 120 µm. Its high-speed response due to the piezo actuator enables high-precision and stable positioning at the nanoscale, contributing to the advancement of fine assembly processes. 【Application Scenarios】 - Precise positioning of fine components - High-speed assembly of small parts - High-precision inspection processes 【Benefits of Implementation】 - Improved assembly accuracy - Reduced defect rates - Shortened assembly time

  • P-611.1S_KUZ.jpg
  • Actuator
  • Piezoelectric Devices
  • encoder
  • Piezo Nanopositioner

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Piezo Nanopositioner for Semiconductor Manufacturing Equipment

Compact design with a 44 mm square. Piezo nano-positioning stage achieving a 120 µm operating range and 0.2 nm resolution.

In semiconductor manufacturing processes, precise positioning at the nanometer level is required during wafer processing and inspection stages. Especially in semiconductor processes where miniaturization is advancing, positioning accuracy significantly impacts product quality and yield. The P-611.XZ / P-611.2 is a piezo nano-positioner that achieves a maximum travel range of 120 µm and a high resolution of 0.2 nm, all within a compact design of 44 mm × 44 mm. With its high-precision flexure guide mechanism and PICMA(R) piezo actuators, it enables stable nano-positioning in semiconductor manufacturing and inspection equipment. 【Application Scenarios】 - Semiconductor manufacturing equipment - Wafer inspection equipment - Nano fabrication and micro fabrication equipment - Optical alignment equipment 【Benefits of Implementation】 - Improved yield through nano-level positioning - Enhanced inspection accuracy through high-precision positioning - Easier integration into equipment due to compact design - Stable process control due to high reproducibility

  • P-611_KUZ.jpg
  • P-611_KUZ_02.jpg
  • Piezoelectric Devices
  • Actuator
  • encoder
  • Piezo Nanopositioner

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